E-LMTE390-XY-330X330 Large travel hollow linear motor stage

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E-LMTE390-XY-330X330 Large travel hollow linear motor stage Featured Image

E-LMTE390-XY-330X330 Large travel hollow linear motor stage

Short Description:

It is used in large hollow microscopes and is widely used in semiconductor inspection.

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Product Detail

Specification

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Specifcation	X-axis	Y-axis
Motor type	Dual linear motor drive
Raster resolution	sincos 4.88nm（Optional absolute value or higher resolution）
Motor thrust	Continuous 60N/Peak 210N	Continuous 120N/Peak 420N
Minimum step size [nm]	50nm(Paired with nanopwm or linear driver)
Travel [mm]	330	330
Repeatability	±0.25
Positioning accuracy [um]	±1（Interferometer calibration）
Flatness [um]	≤±2.5um
Straightness [um]	≤±1.5um	≤±2um
Maximum speed [mm/s]	1000
Maximum acceleration [g] no load	1.5g（X alex）1g（Y alex）
Maximum load [kg]	30

High Precision Linear Motor Stage

Linear Motor Stage

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